Published in
2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)
DOI: 10.1109/iitc-mam.2015.7325606
Links
Tools
Theoretical investigation of in situ k-restore processes for damaged ultra-low-k materials
Proceedings article published in 2015 by
Anja Forster,
Christian Wagner,
Jorg Schuster 
,
Sibylle Gemming
,
Sibylle Gemming
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Published version:
archiving forbidden
Data provided by 