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Proceedings of 11th International Conference on Ion Implantation Technology
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TED of boron in presence of EOR defects: the role of the evolution of Si self-interstitial supersaturation between the loops
Proceedings article published in 1970 by
C. Bonafos,
B. de Mauduit,
M. Omri,
G. BenAssayag,
A. Claverie,
D. Alquier,
A. Martinez,
D. Mathiot
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