Published in
International Electron Devices Meeting. IEDM Technical Digest
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Low resistance Ti or Co salicided raised source/drain transistors for sub-0.13 μm CMOS technologies
Proceedings article published in 2002 by
C.-P. Chao,
K. E. Violette,
S. Unnikrishnan,
M. Nandakumar,
R. L. Wise,
J. A. Kittl 
,
Q.-Z. Hong,
I.-C. Chen
,
Q.-Z. Hong,
I.-C. Chen
This paper was not found in any repository, but could be made available legally by the author.
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