Published in
1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105)
DOI: 10.1109/icsict.1998.786509
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A new release process in surface micromachining-double mask technology
Proceedings article published in 1970 by
Hao Yilong,
Li Ting,
Shimei Liu,
Tian Dayu,
Luo Kui,
Deng Ke,
Wang Tiesong
This paper was not found in any repository, but could be made available legally by the author.
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