Published in
81st ARFTG Microwave Measurement Conference
DOI: 10.1109/arftg.2013.6579053
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Intermodulation distortion of actuated MEMS capacitive switches
Proceedings article published in 2013 by
Xi Luo,
Yaqing Ning,
David Molinero,
Cristiano Palego,
James C. M. Hwang,
Charles L. Goldsmith
This paper is available in a repository.
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