Aerosol-Assisted Chemical Vapor Deposition of NbS2 and TaS2 Thin Films from Pentakis(dimethylamido)metal Complexes and 2-Methylpropanethiol

Wiley, European Journal of Inorganic Chemistry, 20(2005), p. 4179-4185, 2005

Journal article published in 2005 by Emily S. Peters, Claire J. Carmalt

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