Published in
Elsevier, Thin Solid Films, 14(520), p. 4547-4550
DOI: 10.1016/j.tsf.2011.10.186
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Electrical properties of quaternary HfAlTiO thin films grown by atomic layer deposition
Journal article published in 2012 by
A. P. Alekhin,
A. A. Chouprik 
,
I. P. Grigal,
S. A. Gudkova,
Y.-U. Y.-U. Lebedinskii,
A. M. Markeev ,
S. A. Zaitsev
,
I. P. Grigal,
S. A. Gudkova,
Y.-U. Y.-U. Lebedinskii,
A. M. Markeev ,
S. A. Zaitsev
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