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American Institute of Physics, Review of Scientific Instruments, 2(87), p. 02C104, 2016

DOI: 10.1063/1.4932989

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Development of a long-slot microwave plasma source

Journal article published in 2016 by Y. Kuwata, T. Kasuya, N. Miyamoto, M. Wada ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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