Published in
American Institute of Physics, Review of Scientific Instruments, 2(83), p. 02A501
DOI: 10.1063/1.3655529
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Upgraded vacuum arc ion source for metal ion implantation
Journal article published in 2012 by
A. G. Nikolaev,
E. M. Oks 
,
K. P. Savkin,
G. Y.-U. Yushkov ,
I. G. Brown
,
K. P. Savkin,
G. Y.-U. Yushkov ,
I. G. Brown
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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