Published in
Elsevier, Thin Solid Films, 16(517), p. 4673-4678
DOI: 10.1016/j.tsf.2009.02.139
Links
Tools
AlN films sputtered on iridium electrodes for bulk acoustic wave resonators
Journal article published in 2009 by
M. Clement,
J. Olivares,
E. Iborra 
,
S. González-Castilla,
N. Rimmer,
A. Rastogi
,
S. González-Castilla,
N. Rimmer,
A. Rastogi
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Postprint:
archiving forbidden
Published version:
archiving forbidden
Data provided by 