Growth conditions and structural properties as limiting factors of electrical parameters of ZnO thin films grown by Atomic Layer Deposition with diethylzinc and water precursors
Journal article published in 2010 by
Tomasz A. Krajewski,
Grzegorz Łuka,
Łukasz Wachnicki,
Elżbieta Guziewicz,
Marek Godlewski,
Bartłomiej Witkowski 
,
Małgorzata Łukasiewicz,
Elżbieta Łusakowska,
Bogdan J. Kowalski ,
Wojciech Paszkowicz
,
Małgorzata Łukasiewicz,
Elżbieta Łusakowska,
Bogdan J. Kowalski ,
Wojciech Paszkowicz
This paper is made freely available by the publisher.
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