Published in
Wiley, physica status solidi (a) – applications and materials science, 8(208), p. 1920-1924
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A comparative study of the microstructure-dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
Journal article published in 2011 by
Mihaela Popovici,
Kazuyuki Tomida,
Johan Swerts,
Paola Favia,
Annelies Delabie,
Hugo Bender,
Christoph Adelmann 
,
Hilde Tielens,
Bert Brijs,
Ben Kaczer,
Malgorzata A. Pawlak,
Min-Soo Kim,
Laith Altimime,
Sven Van Elshocht,
Jorge A. Kittl
,
Hilde Tielens,
Bert Brijs,
Ben Kaczer,
Malgorzata A. Pawlak,
Min-Soo Kim,
Laith Altimime,
Sven Van Elshocht,
Jorge A. Kittl
This paper was not found in any repository, but could be made available legally by the author.
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