Chemical and Morphological Characterization of Low-k Dielectric Films Deposited From Hexamethyldisiloxane and Ethylene RF Glow Discharges
Journal article published in 2010 by
Anna Maria Coclite,
Antonella Milella,
Fabio Palumbo 
,
Francesco Fracassi,
Riccardo d'Agostino
,
Francesco Fracassi,
Riccardo d'Agostino
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