Atomic Layer Deposition of Gadolinium Aluminate using Gd(iPrCp)3, TMA, and O3 or H2O
Journal article published in 2010 by
Christoph Adelmann 
,
Dieter Pierreux,
Johan Swerts,
Daan Dewulf,
An Hardy,
Hilde Tielens,
Alexis Franquet,
Bert Brijs,
Alain Moussa,
Thierry Conard,
Marlies K. Van Bael ,
Jan W. Maes,
Malgorzata Jurczak,
Jorge A. Kittl ,
Sven Van Elshocht
,
Dieter Pierreux,
Johan Swerts,
Daan Dewulf,
An Hardy,
Hilde Tielens,
Alexis Franquet,
Bert Brijs,
Alain Moussa,
Thierry Conard,
Marlies K. Van Bael ,
Jan W. Maes,
Malgorzata Jurczak,
Jorge A. Kittl ,
Sven Van Elshocht
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