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Wiley, Plasma Processes and Polymers, S1(6), p. S129-S134, 2009

DOI: 10.1002/ppap.200930416

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Deposition of TiONC Coatings by Plasma Immersion Ion Implantation and Deposition

This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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