Published in
Elsevier, Microelectronic Engineering, 8(88), p. 1972-1974
DOI: 10.1016/j.mee.2011.02.042
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Fabrication of large scale arrays of metallic nanodots by means of high resolution e-beam lithography
Journal article published in 2011 by
Vitaliy A. Guzenko,
Jörg Ziegler,
Anastasia Savouchkina,
Celestino Padeste 
,
Christian David
,
Christian David
This paper was not found in any repository, but could be made available legally by the author.
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