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Elsevier, Electrochimica Acta, 28(56), p. 10516-10523

DOI: 10.1016/j.electacta.2011.02.074

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Electrochemical and time-of-flight secondary ion mass spectrometry analysis of ultra-thin metal oxide (Al2O3 and Ta2O5) coatings deposited by atomic layer deposition on stainless steel

Journal article published in 2011 by Belén Díaz, Jolanta Światowska, Vincent Maurice, Antoine Seyeux, Bernard Normand ORCID, Emma Härkönen, Mikko Ritala, Philippe Marcus
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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