Iron diffused x-cut lithium niobate samples have been studied from a structural point of view by ion beam analysis techniques in channeling conditions. The aim of this work is to determine the most probable position of iron atoms after high temperature diffusion treatment in pure oxygen atmosphere and to verify their location after an additional full reducing annealing at low temperature. The results are compared with the bulk doping case that can be considered the final equilibrium state of the diffusion process. By comparing the iron signal with niobium and lithium counterparts in angular scans along proper crystallographic directions, we demonstrate that iron occupies in any case the lithium site or a very close position regardless of the reduction degree, just as in the case of bulk doped samples.