Smart-Cut(R) process: an original way to obtain thin films by ion implantation

Aspar, B.; Lagahe, C.; Moriceau, H.; Soubie, A.; Jalaguier, E.; Biasse, B.; Papon, A.; Chabli, A.; Claverie, A.; Grisolia, J.; Benassayag, G.; Barge, T.; Letertre, F.; Ghyselen, B.

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2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)

DOI: 10.1109/.2000.924138

2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)

DOI: 10.1109/iit.2000.924138

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Smart-Cut(R) process: an original way to obtain thin films by ion implantation

Proceedings article published in 2000 by B. Aspar, C. Lagahe, H. Moriceau, A. Soubie, E. Jalaguier, B. Biasse, A. Papon, A. Chabli, A. Claverie, J. Grisolia, G. Benassayag, T. Barge, F. Letertre, B. Ghyselen

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Smart-Cut(R) process: an original way to obtain thin films by ion implantation