Published in
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)
DOI: 10.1109/.2000.924102
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)
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Energetics of interstitial defects and TED in ultra low energy implants
Proceedings article published in 2000 by
B. Colombeau,
F. Cristiano,
G. B. Assayag,
A. Altibelli,
A. Claverie
This paper was not found in any repository, but could be made available legally by the author.
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