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Elsevier, Thin Solid Films, 1-2(369), p. 324-327

DOI: 10.1016/s0040-6090(00)00873-7

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Si/SiGe n-type inverted modulation doping using ion implantation

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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