Published in
Elsevier, Journal of Alloys and Compounds, (550), p. 258-262
DOI: 10.1016/j.jallcom.2012.09.134
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Influence of the substrate bias voltage on the physical properties of dc reactive sputtered Ta2O5 films
Journal article published in 2013 by
K. Cang,
L. Y. Liang 
,
Z. M. Liu,
L. Wu,
H. Luo,
H. T. Cao,
Y. S. Zou
,
Z. M. Liu,
L. Wu,
H. Luo,
H. T. Cao,
Y. S. Zou
This paper was not found in any repository, but could be made available legally by the author.
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