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Elsevier, Journal of Non-Crystalline Solids, (187), p. 101-105

DOI: 10.1016/0022-3093(95)00120-4

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Structural damage and defects created in SiO2 films by Ar ion implantation

Journal article published in 1995 by B. Garrido, J. Samitier, S. Bota, C. Domínguez ORCID, J. Montserrat, J. R. Morante
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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