Dissemin is shutting down on January 1st, 2025

Published in

American Institute of Physics, Applied Physics Letters, 9(86), p. 091501

DOI: 10.1063/1.1869533

Links

Tools

Export citation

Search in Google Scholar

Double layer formation in the expanding region of an inductively coupled electronegative plasma

Journal article published in 2005 by N. Plihon, C. S. Corr ORCID, P. Chabert
This paper is available in a repository.
This paper is available in a repository.

Full text: Download

Green circle
Preprint: archiving allowed
Upload
Green circle
Postprint: archiving allowed
Upload
Orange circle
Published version: archiving restricted
Upload
Policy details
Data provided by SHERPA/RoMEO

Abstract

Double-layers (DLs) were observed in the expanding region of an inductively coupled plasma with $\text{Ar}/\text{SF}\_6$ gas mixtures. No DL was observed in pure argon or $\text{SF}\_6$ fractions below few percent. They exist over a wide range of power and pressure although they are only stable for a small window of electronegativity (typically between 8\% and 13\% of $\text{SF}\_6$ at 1mTorr), becoming unstable at higher electronegativity. They seem to be formed at the boundary between the source tube and the diffusion chamber and act as an internal boundary (the amplitude being roughly 1.5$\frac{kT\_e}{e}$)between a high electron density, high electron temperature, low electronegativity plasma upstream (in the source), and a low electron density, low electron temperature, high electronegativity plasma downstream.