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Materials Research Society, Materials Research Society Symposium Proceedings, (688), 2001

DOI: 10.1557/proc-688-c1.3.1

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Precise Control of Nucleation and Growth in Lead Zirconate Titanate Thin Films by Scanning Rapid Thermal Annealing

Journal article published in 2001 by Jang-Sik Lee ORCID, Seung-Ki Joo
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

AbstractIn this paper, a novel annealing method, scanning-rapid thermal annealing (RTA), for the selectively nucleated lateral crystallization (SNLC) of Pb(Zr,Ti)O3 (PZT) thin films is discussed. The effects of lamp power and scan speed on the SNLC were investigated. It was found that scanning-RTA was very effective method for SNLC in reducing the process time and preventing undesirable nucleation at other than pre-determined positions.