Published in
Society of Photo-optical Instrumentation Engineers, Journal of Micro/Nanolithography, MEMS, and MOEMS, 1(15), p. 014001
DOI: 10.1117/1.jmm.15.1.014001
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Evaluation of the effect of data quality on the profile uncertainty of critical dimension small angle x-ray scattering
Journal article published in 2016 by
Daniel F. Sunday 
,
Scott List,
Jasmeet S. Chawla,
R. Joseph Kline
,
Scott List,
Jasmeet S. Chawla,
R. Joseph Kline
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Preprint: archiving forbidden
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