We present a new generic method to synthesize nanostructured metal(II) oxide films on a substrate such as silicon. Vacuum ultraviolet (VUV) excimer lamps rupture metal organic precursors, creating volatile organic fragments, while the metal species at the surface form oxides. X-ray photoemission spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) confirm that 172 nm VUV irradiation of manganese and copper phthalocyanines yields manganese(II) and copper(II) oxides, respectively. The morphology of the precursor film provides a template from which metal oxide nanoparticles are formed, which we demonstrate for particles with dimensions 40 x 40 x 10 nm(3). Our procedure is both simple and flexible, with low thermal budget and potential for patterning.