Published in
The Electrochemical Society, Journal of The Electrochemical Society, 7(158), p. H687, 2011
DOI: 10.1149/1.3582524
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Atomic Layer Deposition of High-κ Dielectrics on Sulphur-Passivated Germanium
Journal article published in 2011 by
S. Sioncke,
H. C. Lin,
G. Brammertz 
,
A. Delabie,
T. Conard,
A. Franquet,
M. Meuris,
H. Struyf,
S. De Gendt,
M. Heyns,
C. Fleischmann,
K. Temst,
A. Vantomme,
M. Müller,
M. Kolbe
and other authors.
,
A. Delabie,
T. Conard,
A. Franquet,
M. Meuris,
H. Struyf,
S. De Gendt,
M. Heyns,
C. Fleischmann,
K. Temst,
A. Vantomme,
M. Müller,
M. Kolbe
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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