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The Electrochemical Society, Electrochemical and Solid-State Letters, 10(12), p. G65

DOI: 10.1149/1.3186643

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Room-Temperature Cosputtered HfO[sub 2]–Al[sub 2]O[sub 3] Multicomponent Gate Dielectrics

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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