Published in
The Electrochemical Society, Journal of The Electrochemical Society, 6(153), p. F106
DOI: 10.1149/1.2192729
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From Low-k to Ultralow-k Thin-Film Deposition by Organosilicon Glow Discharges
Journal article published in 2006 by
Antonella Milella,
James L. Delattre,
Fabio Palumbo 
,
Francesco Fracassi,
Riccardo d’Agostino
,
Francesco Fracassi,
Riccardo d’Agostino
This paper was not found in any repository, but could be made available legally by the author.
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