Published in
Institute of Electrical and Electronics Engineers, IEEE Transactions on Plasma Science, 11(42), p. 3498-3507, 2014
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Influence of Ar and N<sub>2</sub>Pressure on Plasma Chemistry, Ion Energy, and Thin Film Composition During Filtered Arc Deposition From Ti<sub>3</sub>SiC<sub>2</sub>Cathodes
Journal article published in 2014 by
Anders O. Eriksson 
,
Stanislav Mraz,
Jens Jensen,
Lars Hultman,
Igor Zhirkov,
Jochen M. Schneider,
Johanna Rosen
,
Stanislav Mraz,
Jens Jensen,
Lars Hultman,
Igor Zhirkov,
Jochen M. Schneider,
Johanna Rosen
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