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Institute of Electrical and Electronics Engineers, IEEE Transactions on Electron Devices, 9(62), p. 2830-2836, 2015

DOI: 10.1109/ted.2015.2463713

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Demonstration of Field- and Power-Dependent ESD Failure in AlGaN/GaN RF HEMTs

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

This paper reports an extensive analysis of the electrostatic discharge (ESD) robustness and of the corresponding failure mechanisms of AlGaN/gallium nitride high-electron mobility transistors. Based on transmission line pulse testing, we demonstrate the following results: 1) when ESD pulses are applied to the drain under pinchoff conditions, failure occurs through a field-dependent mechanism; the failure voltage is independent on the gate bias, and approximately equal to 300 V; 2) when ESD pulses are applied to the drain under ON-state conditions, a power-dependent mechanism prevails, lowering the ESD robustness; 3) vertical (drain substrate) breakdown does not significantly affect the ESD stability of the devices; the failure threshold for vertical failure is higher than 450 V; and 4) the length of the field plate can significantly impact the ESD behavior of the devices, by influencing the failure threshold and by favoring soft-degradation processes. Scanning electron microscopy was extensively used to achieve a complete description of the failure processes. © 2015 IEEE.