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Institute of Electrical and Electronics Engineers, IEEE Journal of the Electron Devices Society, 3(3), p. 284-290, 2015

DOI: 10.1109/jeds.2014.2358588

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A Study on the Diffuse Mechanism and the Barrier Property of Copper Manganese Alloy on Tantalum

Journal article published in 2015 by Ying-Sen Su, Wen-Hsi Lee, Shih-Chieh Chang, Ying-Lang Wang
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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