AbstractPure ZnO, and Al doped ZnO, 120 -300 nm thin films on glass substrates, were synthesized by inkjet printing technique using zinc and aluminum acetate solution as precursors and a two stage heat treatment process to obtain polycrystalline hexagonal wurtzite structure with the mean grain size of 25 and 30 nm respectively. All films exhibit a transmittance above 85-90% in the visible wavelength range below 700 nm. In the Al doped films the UV absorption spectra show a strong absorption onset below 380nm followed by shoulders centered around 325 nm depending on the film thickness. The electrical conductivity of Al doped ZnO thin films is larger by two orders of magnitude than that for pure ZnO films while the photoconductivity increases by about three orders of magnitude under UV irradiation. The photoresponse of the films with UV irradiation in terms of the rise and decay times in the frequency range from 5 to 500 Hz is also presented and discussed.