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Springer, Journal of Materials Research, 8(14), p. 3204-3207, 1999

DOI: 10.1557/jmr.1999.0432

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Synthesis of nanocrystalline diamond by the direct ion beam deposition method

Journal article published in 1999 by X. S. Sun, N. Wang ORCID, W. J. Zhang, H. K. Woo, X. D. Han, I. Bello, C. S. Lee ORCID, S. T. Lee
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Nanocrystalline diamond has been synthesized on a mirror-polished Si(001) substrate by means of direct ion beam deposition. Low-energy (80–200 eV) hydrocarbon and hydrogen ions, generated in a Kaufman ion source, were used to bombard the substrates. The bombarded samples were characterized by high-resolution transmission electron microscopy and Raman spectroscopy. Nanocrystalline diamond particles of random orientation were observed in a matrix of amorphous carbon film on the Si(001) substrate. The size of the nanocrystalline diamond particles varied in the range of 50–300 Å. The mechanism of ion-induced formation of nanocrystalline diamond is discussed.