Published in
Inderscience, International Journal of Materials and Product Technology, 1/2(39), p. 159
DOI: 10.1504/ijmpt.2010.034268
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The reactive gas pulsing process for tuneable properties of sputter deposited titanium oxide, nitride and oxynitride coatings
Journal article published in 2010 by
Nicolas Martin 
,
Aurelien Besnard,
Fabrice Sthal,
Jamal Takadoum
,
Aurelien Besnard,
Fabrice Sthal,
Jamal Takadoum
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