Published in
The Electrochemical Society, Journal of The Electrochemical Society, 4(157), p. G105
DOI: 10.1149/1.3301663
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Atomic Layer Deposition of Gd-Doped HfO[sub 2] Thin Films
Journal article published in 2010 by
C. Adelmann 
,
H. Tielens,
D. Dewulf,
A. Hardy,
D. Pierreux,
J. Swerts,
E. Rosseel,
X. Shi,
M. K. Van Bael ,
J. A. Kittl ,
S. Van Elshocht
,
H. Tielens,
D. Dewulf,
A. Hardy,
D. Pierreux,
J. Swerts,
E. Rosseel,
X. Shi,
M. K. Van Bael ,
J. A. Kittl ,
S. Van Elshocht
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