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Selected Topics in Electronics and Systems, p. 113-119

DOI: 10.1142/9789814287876_0013

World Scientific Publishing, International Journal of High Speed Electronics and Systems, 01(19), p. 113-119

DOI: 10.1142/s0129156409006151

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MBE GROWTH AND CHARACTERIZATION OF Mg -DOPED III-NITRIDES ON SAPPHIRE

This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Plasma-assisted molecular beam epitaxial growth of Mg -doped GaN and InGaN on a sapphire substrate is investigated in this study. Electrical characteristics of p -type GaN strongly depend on the flux of Mg acceptors and the growth temperature. Only the intermediate range of Mg fluxes (beam equivalent pressures near 1×10-9T) produce p -type GaN with good electrical properties, and a maximum hole concentration of 3.5 × 1018 cm-3 is obtained with a Hall mobility of 2.1 cm2/V·s. Due to the strong surface accumulation of electrons, Hall measurements do not indicate p -type polarity for In fraction beyond 11%. In contrast, hot probe measurements show that p -polarity can be measured for the entire range of Mg -doped In mole fractions. Electroluminescence also indicates p -polarity for Ga -rich mole fractions. In x Ga1- x N p - n homojunctions are fabricated and tested. All GaN devices show low series resistance (0.03 ohm-cm2) and insignificant parasitic leakage. IV curves of all three InGaN homojunctions show rectifying characteristics under dark conditions and photo-response under outdoor sunlight, indicating the existence of holes in InGaN with up to 40% In content.