Dissemin is shutting down on January 1st, 2025

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American Institute of Physics, Journal of Vacuum Science and Technology A, 2(33), p. 020801

DOI: 10.1116/1.4907926

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Electromagnetic effects in high-frequency large-area capacitive discharges: A review

Journal article published in 2015 by Yong-Xin Liu, Yu-Ru Zhang, Annemie Bogaerts ORCID, You-Nian Wang
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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