Published in
EDP Sciences, Journal de Physique 4, PR8(09), p. Pr8-699-Pr8-708
DOI: 10.1051/jp4:1999888
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CVD induced by ion beams for the preparation of oxide and nitride thin films
Journal article published in 1999 by
A. R. González-Elipe,
J. P. Espinós,
A. Barranco 
,
F. Yubero,
A. Caballero
,
F. Yubero,
A. Caballero
This paper was not found in any repository, but could be made available legally by the author.
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