Published in
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI: 10.1109/memsys.2015.7050949
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Three-dimensional integration of suspended single-crystalline silicon MEMS arrays with CMOS
Proceedings article published in 2015 by
Zhen Song,
Yuxin Du,
Miao Liu,
Shujie Yang 
,
Dong Wu,
Zheyao Wang
,
Dong Wu,
Zheyao Wang
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