Published in
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOI: 10.1109/memsys.2015.7050889
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Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process
Proceedings article published in 2015 by
Vikrant J. Gokhale 
,
Cesar Figueroa,
Julius Ming Lin Tsai,
Mina Rais-Zadeh
,
Cesar Figueroa,
Julius Ming Lin Tsai,
Mina Rais-Zadeh
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