Nanostructured Materials for Advanced Technological Applications, p. 103-113
DOI: 10.1007/978-1-4020-9916-8_9
New functional materials and material structures with nanoscale features need new techniques for their characterization. In this condensed follow-up to the ASI presentation we will emphasize improvements of traditional microscopic methods, such as the combination of microscopy and spectroscopy with ion etching methods, and indicate some new corresponding trends in electron microscopy.