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American Institute of Physics, Applied Physics Letters, 3(107), p. 031107, 2015

DOI: 10.1063/1.4927313

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Optical loss by surface transfer doping in silicon waveguides

Journal article published in 2015 by Luca Alloatti ORCID, Christian Koos, Juerg Leuthold ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

We show that undoped silicon waveguides may suffer of up to 1.8 dB/cm free-carrier absorption caused by improper surface passivation. To verify the effects of free-carriers we apply a gate field to the waveguides. Smallest losses correspond to higher electrical sheet resistances and are generally obtained with non-zero gate fields. The presence of free carriers for zero gate field is attributed to surface transfer doping. These results open new perspectives for minimizing propagation losses in silicon waveguides and for obtaining low-loss and highly conductive silicon films without applying a gate voltage. ; Comment: 4 pages, 2 figures