Published in
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
DOI: 10.1109/asmc.2015.7164494
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An empirical approach to accurate single wafer wet etch simulation
Proceedings article published in 2015 by
Manish Kumar Singh 
,
Ping-Jung Huang,
Pi-Chun Yu,
Jack Shih
,
Ping-Jung Huang,
Pi-Chun Yu,
Jack Shih
This paper was not found in any repository, but could be made available legally by the author.
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