Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si

Nature Research, Nature, 6883(416), p. 826-829, 2002

Journal article published in 2002 by P. M. Voyles

, J. L. Grazul, P. H. Citrin, H.-J. L. Gossmann

This paper is made freely available by the publisher.

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