Published in
IOP Publishing, Journal of Micromechanics and Microengineering, 6(20), p. 064007, 2010
DOI: 10.1088/0960-1317/20/6/064007
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Evaluation of resonating Si cantilevers sputter-deposited with AlN piezoelectric thin films for mass sensing applications
Journal article published in 2010 by
Ü. Sökmen,
A. Stranz,
A. Waag,
A. Ababneh,
H. Seidel,
U. Schmid,
E. Peiner 
This paper was not found in any repository, but could be made available legally by the author.
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