Published in
IOP Publishing, Nanotechnology, 18(22), p. 185301
DOI: 10.1088/0957-4484/22/18/185301
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Efficient methods of nanoimprint stamp cleaning based on imprint self-cleaning effect
Journal article published in 2011 by
Fantao Meng,
Gang Luo,
Ivan Maximov 
,
Lars Montelius,
Ye Zhou,
Lars Nilsson,
Patrick Carlberg,
Babak Heidari,
Jinkui Chu,
H. Q. Xu
,
Lars Montelius,
Ye Zhou,
Lars Nilsson,
Patrick Carlberg,
Babak Heidari,
Jinkui Chu,
H. Q. Xu
Distributing this paper is prohibited by the publisher
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