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Nature Research, Scientific Reports, 1(3), 2013

DOI: 10.1038/srep03414

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New approach for structural characterization of planar sets of nanoparticles embedded into a solid matrix

Journal article published in 2013 by Dario Ferreira Sanchez, Gabriel Guterres Marmitt, Cristiane Marin, Daniel Lorscheitter Baptista ORCID, Gustavo de M. Azevedo, Gustavo de Medeiros Azevedo, Pedro Luis Grande, Paulo Fernando Papaleo Fichtner
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

In this work we demonstrate that Medium Energy Ion Scattering (MEIS) measurements in combination with Transmission Electron Microscopy (TEM) or Grazing Incidence Small Angle X-Ray Scattering (GISAXS) can provide a complete characterization of nanoparticle (NP) systems embedded into dielectric films. This includes the determination of the nanoparticle characteristics (location, size distribution and number concentration) as well as the depth distribution and concentration of the NP atomic components dispersed in the matrix. Our studies are performed considering a model case system consisting of planar arrangements of Au NPs (size range from 1 to 10 nm) containing three distinct Au concentrations embedded in a SiO2 film.