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American Institute of Physics, AIP Conference Proceedings, 2014

DOI: 10.1063/1.4883036

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Atomistic characterization of SAM coatings as gate insulators in Si-based FET devices

Proceedings article published in 2014 by Fabrizio Gala, Giuseppe Zollo ORCID
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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Abstract

Many nano-material systems are currently under consideration as possible candidates for gate dielectric insulators in both metal-oxide-semiconductor (MOSFET) and organic (OFET) field-effect transistors. In this contribution, the possibility of employing self-assembled monolayers (SAMs) of hydroxylated octadecyltrichlorosilane (OTS) chains on a (111) Si substrate as gate dielectrics is discussed; in particular ab initio theoretical simulations have been employed to study the structural properties, work function modifications, and the insulating properties of OTS thin film coatings on Si substrates. © 2014 AIP Publishing LLC.